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Experimental design in the deposition of BN interface coatings on SiC fibers by chemical vapor deposition

, and . Surface and Coatings Technology, 201 (6): 2741--2748 (2006)
DOI: doi:10.1016/j.surfcoat.2006.05.026

Abstract

Boron Nitride (BN) coatings deposited by chemical vapor deposition (CVD) have been increasingly used as an interface material for SiC/SiC composites. In this work, the CVD of BN was investigated using a statistical design of experiments (DOE) approach. In order to determine the most significant parameters for the process a two-level screening design (Plackett Burman) was employed. The deposition pressure, gas mixture dilution factor, deposition time, and the reaction gas flow ratios were found to be the most significant factors that influenced coating thickness. To optimize the deposition process, a three-level surface response desig…(more)

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