Boron Nitride (BN) coatings deposited by chemical vapor deposition
(CVD) have been increasingly used as an interface material for SiC/SiC
composites. In this work, the CVD of BN was investigated using a
statistical design of experiments (DOE) approach. In order to determine
the most significant parameters for the process a two-level screening
design (Plackett Burman) was employed. The deposition pressure, gas
mixture dilution factor, deposition time, and the reaction gas flow
ratios were found to be the most significant factors that influenced
coating thickness. To optimize the deposition process, a three-level
surface response design (Box Behnken) was used with the aim of producing
a predictive mathematical model of the process. The generated response
surface modeling (RSM) showed that deposition time had the greatest
effect on coating thickness while, temperature time and temperature
NH3/BCl3 interactions may be large at low/high NH3/BCl3 ratios and
high deposition time, respectively. Tensile strength was strongly
influenced by the deposition temperature and deposition time. The
response model showed the dependence of tensile strength on coating
thickness, NH3/BCl3 gas flow ratios and time. The model interaction
plots suggested a dependence of temperature?gas flow ratio on tensile
strengths of BN coated SiC fibers.
Department of Chemistry, University of Connecticut, Unit-3060, Storrs,
CT 06269, USA
bInstitute of Material Science, University of Connecticut, Storrs,
CT 06269, USA
%0 Journal Article
%1 Nyutu2006
%A Nyutu, E. K.
%A Suib, S. L.
%D 2006
%J Surface and Coatings Technology
%K (RSM) BN; Composites; Design Interfacial Response coatings; experiments; modeling of surface
%N 6
%P 2741--2748
%R doi:10.1016/j.surfcoat.2006.05.026
%T Experimental design in the deposition of BN interface coatings on
SiC fibers by chemical vapor deposition
%V 201
%X Boron Nitride (BN) coatings deposited by chemical vapor deposition
(CVD) have been increasingly used as an interface material for SiC/SiC
composites. In this work, the CVD of BN was investigated using a
statistical design of experiments (DOE) approach. In order to determine
the most significant parameters for the process a two-level screening
design (Plackett Burman) was employed. The deposition pressure, gas
mixture dilution factor, deposition time, and the reaction gas flow
ratios were found to be the most significant factors that influenced
coating thickness. To optimize the deposition process, a three-level
surface response design (Box Behnken) was used with the aim of producing
a predictive mathematical model of the process. The generated response
surface modeling (RSM) showed that deposition time had the greatest
effect on coating thickness while, temperature time and temperature
NH3/BCl3 interactions may be large at low/high NH3/BCl3 ratios and
high deposition time, respectively. Tensile strength was strongly
influenced by the deposition temperature and deposition time. The
response model showed the dependence of tensile strength on coating
thickness, NH3/BCl3 gas flow ratios and time. The model interaction
plots suggested a dependence of temperature?gas flow ratio on tensile
strengths of BN coated SiC fibers.
@article{Nyutu2006,
__markedentry = {[Guillaume]},
abstract = {Boron Nitride (BN) coatings deposited by chemical vapor deposition
(CVD) have been increasingly used as an interface material for SiC/SiC
composites. In this work, the CVD of BN was investigated using a
statistical design of experiments (DOE) approach. In order to determine
the most significant parameters for the process a two-level screening
design (Plackett Burman) was employed. The deposition pressure, gas
mixture dilution factor, deposition time, and the reaction gas flow
ratios were found to be the most significant factors that influenced
coating thickness. To optimize the deposition process, a three-level
surface response design (Box Behnken) was used with the aim of producing
a predictive mathematical model of the process. The generated response
surface modeling (RSM) showed that deposition time had the greatest
effect on coating thickness while, temperature time and temperature
NH3/BCl3 interactions may be large at low/high NH3/BCl3 ratios and
high deposition time, respectively. Tensile strength was strongly
influenced by the deposition temperature and deposition time. The
response model showed the dependence of tensile strength on coating
thickness, NH3/BCl3 gas flow ratios and time. The model interaction
plots suggested a dependence of temperature?gas flow ratio on tensile
strengths of BN coated SiC fibers.},
added-at = {2009-11-05T12:01:24.000+0100},
author = {Nyutu, E. K. and Suib, S. L.},
biburl = {https://www.bibsonomy.org/bibtex/2195584c518fb77c6c92fcce5f31536da/ghuot},
doi = {doi:10.1016/j.surfcoat.2006.05.026},
institution = {Department of Chemistry, University of Connecticut, Unit-3060, Storrs,
CT 06269, USA
bInstitute of Material Science, University of Connecticut, Storrs,
CT 06269, USA},
interhash = {49abdf25a6d4b81384e8cc81b26d4b1b},
intrahash = {195584c518fb77c6c92fcce5f31536da},
journal = {Surface and Coatings Technology},
keywords = {(RSM) BN; Composites; Design Interfacial Response coatings; experiments; modeling of surface},
number = 6,
owner = {Guillaume},
pages = {2741--2748},
timestamp = {2009-11-05T12:01:33.000+0100},
title = {Experimental design in the deposition of BN interface coatings on
SiC fibers by chemical vapor deposition},
volume = 201,
year = 2006
}