%0 Journal Article %1 Dutron1995 %A Dutron, A.-M. %A Blanquet, E. %A Ghetta, V. %A Madar, K. %A Bernard, C. %D 1995 %J JOURNAL DE PHYSIQUE IV %K imported %T Morphology and Thermal Stability of Me-Si-N (Me=Re, W, Ta) for Microelectronics %V 5

@article{Dutron1995, added-at = {2009-11-05T12:01:24.000+0100}, author = {Dutron, A.-M. and Blanquet, E. and Ghetta, V. and Madar, K. and Bernard, C.}, biburl = {https://www.bibsonomy.org/bibtex/253643036925b4482e852009a9ef0b55c/ghuot}, file = {Dutron1995.pdf:Re-Si\\Dutron1995.pdf:PDF}, interhash = {22e9aa5f0ef1ccffeb8259c30c66919b}, intrahash = {53643036925b4482e852009a9ef0b55c}, journal = {JOURNAL DE PHYSIQUE IV}, keywords = {imported}, owner = {ghuot}, timestamp = {2009-11-05T12:01:27.000+0100}, title = {Morphology and Thermal Stability of Me-Si-N (Me=Re, W, Ta) for Microelectronics}, volume = 5, year = 1995 }