%0 Conference Paper %1 Wagner.2008c %A Wagner, M. %A Böhm, S. %A Dilger, K. %B Prospects in mechanical engineering - 53. IWK %C 08.--12. September 2008 and Ilmenau %D 2008 %E Ilmenau, Technische Universität %K imported %P 195--196; %T Adhesive bonding of MEMS and MOEMS with support of substrate inherent functional structures

@inproceedings{Wagner.2008c, added-at = {2014-03-10T21:14:47.000+0100}, address = {08.--12. September 2008 and Ilmenau}, author = {Wagner, M. and B{\"o}hm, S. and Dilger, K.}, biburl = {https://www.bibsonomy.org/bibtex/246979d7a68206a05cf977f204ca0433a/konker}, booktitle = {Prospects in mechanical engineering - 53. IWK}, editor = {Ilmenau, Technische Universit{\"a}t}, interhash = {d07d79b580885b5f1db092c5e33830c1}, intrahash = {46979d7a68206a05cf977f204ca0433a}, keywords = {imported}, pages = {195--196;}, timestamp = {2014-03-10T21:14:47.000+0100}, title = {Adhesive bonding of MEMS and MOEMS with support of substrate inherent functional structures}, year = 2008 }