%0 Journal Article %1 journals/mr/LellouchiBTPD02 %A Lellouchi, Djemel %A Beaudoin, Felix %A Touze, Christophe Le %A Perdu, Philippe %A Desplats, Romain %D 2002 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1815-1817 %T IR confocal laser microscopy for MEMS Technological Evaluation. %U http://dblp.uni-trier.de/db/journals/mr/mr42.html#LellouchiBTPD02 %V 42

@article{journals/mr/LellouchiBTPD02, added-at = {2020-02-22T00:00:00.000+0100}, author = {Lellouchi, Djemel and Beaudoin, Felix and Touze, Christophe Le and Perdu, Philippe and Desplats, Romain}, biburl = {https://www.bibsonomy.org/bibtex/2933c7a05d009d620f7f454430bdb94e5/dblp}, ee = {https://doi.org/10.1016/S0026-2714(02)00237-8}, interhash = {4eac322bb03893faeb2fca69c96a7f66}, intrahash = {933c7a05d009d620f7f454430bdb94e5}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1815-1817}, timestamp = {2020-02-25T13:22:12.000+0100}, title = {IR confocal laser microscopy for MEMS Technological Evaluation.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr42.html#LellouchiBTPD02}, volume = 42, year = 2002 }