%0 Conference Paper %1 conf/ps/WuKKCLH19 %A Wu, Zon-Ru %A Kao, Tzu-Chieh %A Kao, Chia-Wei %A Chang, Ping-Chien %A Lin, Wei %A Hung, Yung-Jr %B OECC/PSC %D 2019 %I IEEE %K dblp %P 1-3 %T Wafer-scale grating mapping system for rapid pitch and diffraction efficiency measurement. %U http://dblp.uni-trier.de/db/conf/ps/psc2019.html#WuKKCLH19 %@ 978-4-88552-321-2

@inproceedings{conf/ps/WuKKCLH19, added-at = {2019-11-15T00:00:00.000+0100}, author = {Wu, Zon-Ru and Kao, Tzu-Chieh and Kao, Chia-Wei and Chang, Ping-Chien and Lin, Wei and Hung, Yung-Jr}, biburl = {https://www.bibsonomy.org/bibtex/29d62c246842db8b68be9ce9c3dd3b54f/dblp}, booktitle = {OECC/PSC}, crossref = {conf/ps/2019}, ee = {https://doi.org/10.23919/PS.2019.8817627}, interhash = {70612bba45720577352a650fa67c1d0d}, intrahash = {9d62c246842db8b68be9ce9c3dd3b54f}, isbn = {978-4-88552-321-2}, keywords = {dblp}, pages = {1-3}, publisher = {IEEE}, timestamp = {2024-04-09T19:35:40.000+0200}, title = {Wafer-scale grating mapping system for rapid pitch and diffraction efficiency measurement.}, url = {http://dblp.uni-trier.de/db/conf/ps/psc2019.html#WuKKCLH19}, year = 2019 }