%0 Journal Article %1 wu2015silicagold %A Wu, Xiaofei %A Geisler, Peter %A Krauss, Enno %A Kullock, René %A Hecht, Bert %D 2015 %J Nanoscale %K FIB SEM experiment gold nano-optics %N 39 %P 16427-16433 %R 10.1039/C5NR04262C %T Silica–gold bilayer-based transfer of focused ion beam-fabricated nanostructures %V 7 %X The demand for using nanostructures fabricated by focused ion beam (FIB) on delicate substrates or as building blocks for complex devices motivates the development of protocols that allow FIB-fabricated nanostructures to be transferred from the original substrate to the desired target. However, transfer of FIB-fabricated nanostructures is severely hindered by FIB-induced welding of structure and substrate. Here we present two (ex and in situ) transfer methods for FIB-fabricated nanostructures based on a silica–gold bilayer evaporated onto a bulk substrate. Utilizing the poor adhesion between silica and gold, the nanostructures can be mechanically separated from the bulk substrate. For the ex situ transfer, a spin-coated poly(methyl methacrylate) film is used to carry the nanostructures so that the bilayer can be etched away after being peeled off. For the in situ transfer, using a micro-manipulator inside the FIB machine, a cut-out piece of silica on which a nanostructure has been fabricated is peeled off from the bulk substrate and thus carries the nanostructure to a target substrate. We demonstrate the performance of both methods by transferring plasmonic nano-antennas fabricated from single-crystalline gold flakes by FIB milling to a silicon wafer and to a scanning probe tip.

@article{wu2015silicagold, abstract = {The demand for using nanostructures fabricated by focused ion beam (FIB) on delicate substrates or as building blocks for complex devices motivates the development of protocols that allow FIB-fabricated nanostructures to be transferred from the original substrate to the desired target. However, transfer of FIB-fabricated nanostructures is severely hindered by FIB-induced welding of structure and substrate. Here we present two (ex and in situ) transfer methods for FIB-fabricated nanostructures based on a silica–gold bilayer evaporated onto a bulk substrate. Utilizing the poor adhesion between silica and gold, the nanostructures can be mechanically separated from the bulk substrate. For the ex situ transfer, a spin-coated poly(methyl methacrylate) film is used to carry the nanostructures so that the bilayer can be etched away after being peeled off. For the in situ transfer, using a micro-manipulator inside the FIB machine, a cut-out piece of silica on which a nanostructure has been fabricated is peeled off from the bulk substrate and thus carries the nanostructure to a target substrate. We demonstrate the performance of both methods by transferring plasmonic nano-antennas fabricated from single-crystalline gold flakes by FIB milling to a silicon wafer and to a scanning probe tip.}, added-at = {2020-02-24T10:29:45.000+0100}, author = {Wu, Xiaofei and Geisler, Peter and Krauss, Enno and Kullock, René and Hecht, Bert}, biburl = {https://www.bibsonomy.org/bibtex/2ce6b1af36207db58cb9bce4e0f5cc48f/ep5optics}, day = 15, doi = {10.1039/C5NR04262C}, file = {Snapshot:C\:\\Users\\scherzad\\Zotero\\storage\\GJ4NI28T\\unauth.html:text/html;Wu et al. - 2015 - Silica–gold bilayer-based transfer of focused ion .pdf:C\:\\Users\\scherzad\\Zotero\\storage\\F37IG34R\\Wu et al. - 2015 - Silica–gold bilayer-based transfer of focused ion .pdf:application/pdf}, interhash = {90da0c72552652e25041b8d72de40c67}, intrahash = {ce6b1af36207db58cb9bce4e0f5cc48f}, issn = {2040-3372}, journal = {Nanoscale}, keywords = {FIB SEM experiment gold nano-optics}, language = {en}, month = {09}, number = 39, pages = {16427-16433}, timestamp = {2020-02-24T10:29:45.000+0100}, title = {Silica–gold bilayer-based transfer of focused ion beam-fabricated nanostructures}, urldate = {2020-02-24}, volume = 7, year = 2015 }