%0 Journal Article %1 journals/sensors/RenZXLLZCX18 %A Ren, Dongxu %A Zhao, Zexiang %A Xi, Jianpu %A Li, Bin %A Li, Zhengfeng %A Zhao, Huiying %A Cui, Lujun %A Xu, Hang %D 2018 %J Sensors %K dblp %N 8 %P 2442 %T Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis. %U http://dblp.uni-trier.de/db/journals/sensors/sensors18.html#RenZXLLZCX18 %V 18

@article{journals/sensors/RenZXLLZCX18, added-at = {2020-05-30T00:00:00.000+0200}, author = {Ren, Dongxu and Zhao, Zexiang and Xi, Jianpu and Li, Bin and Li, Zhengfeng and Zhao, Huiying and Cui, Lujun and Xu, Hang}, biburl = {https://www.bibsonomy.org/bibtex/2ca610631f7e3e0523a280d36a5724d96/dblp}, ee = {https://www.wikidata.org/entity/Q90639094}, interhash = {31ddb30219f3f521f7bb59eb24abe54d}, intrahash = {ca610631f7e3e0523a280d36a5724d96}, journal = {Sensors}, keywords = {dblp}, number = 8, pages = 2442, timestamp = {2020-06-02T12:11:52.000+0200}, title = {Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors18.html#RenZXLLZCX18}, volume = 18, year = 2018 }