%0 Thesis %1 dietrich1982herstellung %A Dietrich, Dagmar %D 1982 %K %T Zur Herstellung und Untersuchung amorpher hydrogenierter Siliciumschichten (a-Si:H)

@phdthesis{dietrich1982herstellung, added-at = {2023-12-12T20:40:05.000+0100}, author = {Dietrich, Dagmar}, biburl = {https://www.bibsonomy.org/bibtex/2980b39a554766675380a0ce0630e399e/admin}, dnbtitleid = {830910298}, interhash = {328ee0faa0f43a4457371086f44b0985}, intrahash = {980b39a554766675380a0ce0630e399e}, keywords = {}, school = {TU Chemnitz}, timestamp = {2023-12-12T20:40:05.000+0100}, title = {Zur Herstellung und Untersuchung amorpher hydrogenierter Siliciumschichten (a-Si:H)}, year = 1982 }