Article,

Cavity optomechanics with stoichiometric SiN films

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ArXiv e-prints, (September 2009)

Abstract

We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factor and frequency. Our SiN films support mechanical modes with the unprecedented products of mechanical quality factor \\$Q\_m\\$ and frequency \\$\\nu\_m\\$ reaching \\$Q\_m \\nu\_m \\simeq2 \10^13\\$ Hz. The SiN membranes exhibit a low optical absorption characterized by Im\\$(n) \10^-5\\$ at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.

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