%0 Journal Article %1 Rel:Wilson96 %A Wilson, C.J. %A Beck, P.A. %D 1996 %J Microelectromechanical Systems, Journal of %K Si, analysis, beams, characteristics crystalline device devices, direction edge element elemental finite fracture fracture, initiation load, location, microcantilever micromechanical model, noncompliant plane, reliability, roughness, semiconductor semiconductors, side siliconABAQUS, site, stiffness stress, structures, testing, toughness wall %N 3 %P 142-150 %R 10.1109/84.536620 %T Fracture testing of bulk silicon microcantilever beams subjected to a side load %V 5

@article{Rel:Wilson96, added-at = {2009-07-13T16:53:55.000+0200}, author = {Wilson, C.J. and Beck, P.A.}, biburl = {https://www.bibsonomy.org/bibtex/28273f6f3c7fe445f79991553e02fae70/enodev}, description = {rfmems}, doi = {10.1109/84.536620}, interhash = {376820c1f9cd5276198efed180b8e616}, intrahash = {8273f6f3c7fe445f79991553e02fae70}, issn = {1057-7157}, journal = {Microelectromechanical Systems, Journal of}, keywords = {Si, analysis, beams, characteristics crystalline device devices, direction edge element elemental finite fracture fracture, initiation load, location, microcantilever micromechanical model, noncompliant plane, reliability, roughness, semiconductor semiconductors, side siliconABAQUS, site, stiffness stress, structures, testing, toughness wall}, month = Sep, number = 3, pages = {142-150}, timestamp = {2009-07-14T08:40:47.000+0200}, title = {Fracture testing of bulk silicon microcantilever beams subjected to a side load}, volume = 5, year = 1996 }