Zusammenfassung
Using photoemission intensities and a detection system employed by
many groups in the electron spectroscopy community as an example,
we have quantitatively characterized and corrected detector non-linearity
effects over the full dynamic range of the system. Non-linearity
effects are found to be important whenever measuring relative peak
intensities accurately is important, even in the low countrate regime.
This includes, for example, performing quantitative analysis for
surface contaminants or sample bulk stoichiometries, where the peak
intensities involved can differ by one or two orders of magnitude,
and thus could occupy a significant portion of the detector dynamic
range. Two successful procedures for correcting non-linearity effects
are presented. The first one yields directly the detector efficiency
by measuring a flat-background reference intensity as a function
of incident X-ray flux, while the second one determines the detector
response from a least-squares analysis of broad-scan survey spectra
at different incident X-ray fluxes. Although we have used one spectrometer
and detection system as an example, these methodologies should be
useful for many other cases.
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