%0 Journal Article %1 Wu:Charges %A Wu, Yan %A Shannon, Mark A. %D 2004 %J Journal of Micromechanical Microengineering %K imported %T Theoretical analysis of the effect of static charges in silicon-based dielectric thin films on micro- to nanoscale electrostatic actuation %U http://statcks.iop.org/JMM/14/989 %Z Interesting for very thin stacked material inside electric field

@article{Wu:Charges, added-at = {2009-07-13T16:53:55.000+0200}, annote = {Interesting for very thin stacked material inside electric field}, author = {Wu, Yan and Shannon, Mark A.}, biburl = {https://www.bibsonomy.org/bibtex/21670c0936987cf39b4521b0c03b0e10e/enodev}, description = {rfmems}, interhash = {4012a997c3b9c0bdf21ed16113af60cd}, intrahash = {1670c0936987cf39b4521b0c03b0e10e}, journal = {Journal of Micromechanical Microengineering}, keywords = {imported}, month = May, timestamp = {2009-07-14T08:40:47.000+0200}, title = {Theoretical analysis of the effect of static charges in silicon-based dielectric thin films on micro- to nanoscale electrostatic actuation}, url = {http://statcks.iop.org/JMM/14/989}, year = 2004 }