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%0 Journal Article
%1 journals/tcst/SalamPEGA97
%A Salam, Fathi M. A.
%A Piwek, Christian
%A Erten, Gamze
%A Grotjohn, Timothy A.
%A Asmussen, Jes
%D 1997
%J IEEE Trans. Contr. Sys. Techn.
%K dblp
%N 6
%P 598-613
%T Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks.
%U http://dblp.uni-trier.de/db/journals/tcst/tcst5.html#SalamPEGA97
%V 5
@article{journals/tcst/SalamPEGA97,
added-at = {2015-07-24T00:00:00.000+0200},
author = {Salam, Fathi M. A. and Piwek, Christian and Erten, Gamze and Grotjohn, Timothy A. and Asmussen, Jes},
biburl = {https://www.bibsonomy.org/bibtex/2a07a013e5270334dec87f558952a0ca4/dblp},
ee = {http://dx.doi.org/10.1109/87.641404},
interhash = {464036a8db8fbfe8a69e752e17e746cc},
intrahash = {a07a013e5270334dec87f558952a0ca4},
journal = {IEEE Trans. Contr. Sys. Techn.},
keywords = {dblp},
number = 6,
pages = {598-613},
timestamp = {2015-07-25T11:34:37.000+0200},
title = {Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks.},
url = {http://dblp.uni-trier.de/db/journals/tcst/tcst5.html#SalamPEGA97},
volume = 5,
year = 1997
}