%0 Journal Article %1 journals/mr/TsaoTL02 %A Tsao, Chun-Cheng %A Thompson, Bill %A Lundquist, Ted R. %D 2002 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1667-1672 %T Imaging and Material Analysis from Sputter-Induced Light Emission Using Coaxial Ion-Photon Column. %U http://dblp.uni-trier.de/db/journals/mr/mr42.html#TsaoTL02 %V 42

@article{journals/mr/TsaoTL02, added-at = {2022-08-01T00:00:00.000+0200}, author = {Tsao, Chun-Cheng and Thompson, Bill and Lundquist, Ted R.}, biburl = {https://www.bibsonomy.org/bibtex/212a4ae3c932c14f1a27f4f836af47561/dblp}, ee = {https://doi.org/10.1016/S0026-2714(02)00209-3}, interhash = {4becebefe77cf866b7958e80a2f652e0}, intrahash = {12a4ae3c932c14f1a27f4f836af47561}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1667-1672}, timestamp = {2024-04-09T02:50:36.000+0200}, title = {Imaging and Material Analysis from Sputter-Induced Light Emission Using Coaxial Ion-Photon Column.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr42.html#TsaoTL02}, volume = 42, year = 2002 }