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%0 Conference Paper
%1 conf/nems/MingLLSZWTXC16
%A Ming, Anjie
%A Liu, Weibing
%A Li, Lingling
%A Sun, Xilong
%A Zheng, Xuan
%A Wang, Weibing
%A Tan, Qiulin
%A Xiong, Jijun
%A Chen, Dapeng
%B NEMS
%D 2016
%I IEEE
%K dblp
%P 366-369
%T Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering.
%U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#MingLLSZWTXC16
%@ 978-1-5090-1947-2
@inproceedings{conf/nems/MingLLSZWTXC16,
added-at = {2021-08-05T00:00:00.000+0200},
author = {Ming, Anjie and Liu, Weibing and Li, Lingling and Sun, Xilong and Zheng, Xuan and Wang, Weibing and Tan, Qiulin and Xiong, Jijun and Chen, Dapeng},
biburl = {https://www.bibsonomy.org/bibtex/25f3136e25ab318d98f7bb708c190e459/dblp},
booktitle = {NEMS},
crossref = {conf/nems/2016},
ee = {https://doi.org/10.1109/NEMS.2016.7758269},
interhash = {56f9d639b671407d26e659cc0f2572ce},
intrahash = {5f3136e25ab318d98f7bb708c190e459},
isbn = {978-1-5090-1947-2},
keywords = {dblp},
pages = {366-369},
publisher = {IEEE},
timestamp = {2024-04-09T19:16:28.000+0200},
title = {Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering.},
url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#MingLLSZWTXC16},
year = 2016
}