%0 Conference Paper %1 conf/nems/MingLLSZWTXC16 %A Ming, Anjie %A Liu, Weibing %A Li, Lingling %A Sun, Xilong %A Zheng, Xuan %A Wang, Weibing %A Tan, Qiulin %A Xiong, Jijun %A Chen, Dapeng %B NEMS %D 2016 %I IEEE %K dblp %P 366-369 %T Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering. %U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#MingLLSZWTXC16 %@ 978-1-5090-1947-2

@inproceedings{conf/nems/MingLLSZWTXC16, added-at = {2021-08-05T00:00:00.000+0200}, author = {Ming, Anjie and Liu, Weibing and Li, Lingling and Sun, Xilong and Zheng, Xuan and Wang, Weibing and Tan, Qiulin and Xiong, Jijun and Chen, Dapeng}, biburl = {https://www.bibsonomy.org/bibtex/25f3136e25ab318d98f7bb708c190e459/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2016}, ee = {https://doi.org/10.1109/NEMS.2016.7758269}, interhash = {56f9d639b671407d26e659cc0f2572ce}, intrahash = {5f3136e25ab318d98f7bb708c190e459}, isbn = {978-1-5090-1947-2}, keywords = {dblp}, pages = {366-369}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#MingLLSZWTXC16}, year = 2016 }