%0 Conference Paper %1 conf/ieeesensors/KuruiTFSKISS17 %A Kurui, Yoshihiko %A Tomizawa, Hideyuki %A Fujimoto, Akira %A Saito, Tomohiro %A Kojima, Akihiro %A Ikehashi, Tamio %A Sugizaki, Yoshiaki %A Shibata, Hideki %B IEEE SENSORS %D 2017 %I IEEE %K dblp %P 1-3 %T The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2017.html#KuruiTFSKISS17 %@ 978-1-5090-1012-7

@inproceedings{conf/ieeesensors/KuruiTFSKISS17, added-at = {2022-12-15T00:00:00.000+0100}, author = {Kurui, Yoshihiko and Tomizawa, Hideyuki and Fujimoto, Akira and Saito, Tomohiro and Kojima, Akihiro and Ikehashi, Tamio and Sugizaki, Yoshiaki and Shibata, Hideki}, biburl = {https://www.bibsonomy.org/bibtex/2aa99d4fc73901d2406927e547ac757d7/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2017}, ee = {https://doi.org/10.1109/ICSENS.2017.8233927}, interhash = {576c9523afc4062b8e9596507873c389}, intrahash = {aa99d4fc73901d2406927e547ac757d7}, isbn = {978-1-5090-1012-7}, keywords = {dblp}, pages = {1-3}, publisher = {IEEE}, timestamp = {2024-04-09T12:37:50.000+0200}, title = {The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2017.html#KuruiTFSKISS17}, year = 2017 }