%0 Journal Article %1 noauthororeditor %A C, Raghunandan M S | Shiva Prasad S | Sanjay S %D 2020 %J International Journal of Trend in Scientific Research and Development %K Mems memsfunctionality microfabrications microsystems miniaturizedsystems %N 1 %P 996-999 %T Review on Micro Electro Mechanical Systems %U https://www.ijtsrd.com/engineering/mechanical-engineering/38119/review-on-micro-electro-mechanical-systems/raghunandan-m-s %V 5 %X MEMS acronym for Micro Electro Mechanical System is one of the booming technology that has paved its way in current engineering and technology. This paper includes the explanation of simple MEMS system and its applications. Raghunandan M S | Shiva Prasad S | Sanjay S C "Review on Micro Electro Mechanical Systems" Published in International Journal of Trend in Scientific Research and Development (ijtsrd), ISSN: 2456-6470, Volume-5 | Issue-1 , December 2020, URL: https://www.ijtsrd.com/papers/ijtsrd38119.pdf Paper URL : https://www.ijtsrd.com/engineering/mechanical-engineering/38119/review-on-micro-electro-mechanical-systems/raghunandan-m-s

@article{noauthororeditor, abstract = {MEMS acronym for Micro Electro Mechanical System is one of the booming technology that has paved its way in current engineering and technology. This paper includes the explanation of simple MEMS system and its applications. Raghunandan M S | Shiva Prasad S | Sanjay S C "Review on Micro Electro Mechanical Systems" Published in International Journal of Trend in Scientific Research and Development (ijtsrd), ISSN: 2456-6470, Volume-5 | Issue-1 , December 2020, URL: https://www.ijtsrd.com/papers/ijtsrd38119.pdf Paper URL : https://www.ijtsrd.com/engineering/mechanical-engineering/38119/review-on-micro-electro-mechanical-systems/raghunandan-m-s }, added-at = {2021-01-29T07:27:50.000+0100}, author = {C, Raghunandan M S | Shiva Prasad S | Sanjay S}, biburl = {https://www.bibsonomy.org/bibtex/2e06a16bbac98a884754c1422b8eb1d89/ijtsrd}, interhash = {66734fd66c60bff568e717337c05277c}, intrahash = {e06a16bbac98a884754c1422b8eb1d89}, issn = {2456-6470}, journal = {International Journal of Trend in Scientific Research and Development}, keywords = {Mems memsfunctionality microfabrications microsystems miniaturizedsystems}, language = {English}, month = nov, number = 1, pages = {996-999}, timestamp = {2021-01-29T07:27:50.000+0100}, title = {Review on Micro Electro Mechanical Systems }, url = {https://www.ijtsrd.com/engineering/mechanical-engineering/38119/review-on-micro-electro-mechanical-systems/raghunandan-m-s}, volume = 5, year = 2020 }