Abstract
Arrays of InP-based avalanche photodiodes (APDs) with InGaAsP absorber
regions have been fabricated and characterized in the Geiger mode
for photon-counting applications. Measurements of APDs with InGaAsP
absorbers optimized for 1.06 mu m wavelength show dark count rates
(DCRs) < 20 kHz for room-temperature operation with photon detection
efficiency (PDE) up to 50\% and a reset or dead time of 1 mu s. APDs
with InGaAs absorbers optimized for 1.55 mu m wavelength and 240
K temperature have DCRs < 20 kHz, PDE up to 45\%, and a reset time
of similar to 6 mu s. Arrays for both wavelengths have been fabricated
and packaged with Gal? microlenses (of 100 and 50 pm pitch) and CMOS
readout integrated circuits (ROICs). Comparisons are made between
ROICs that operate in the framed-readout mode as well as those that
operate in continuous-readout mode.
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