%0 Journal Article %1 citeulike:13513887 %A Catling, David C. %D 1998 %J Sensors and Actuators A: Physical %K 78a55-optics-electromagnetic-theory-technical-applications 78a30-electro-and-magnetostatics 31c15-potentials-and-capacities %N 2 %P 157--164 %R 10.1016/s0924-4247(98)80009-5 %T High-sensitivity silicon capacitive sensors for measuring medium-vacuum gas pressures %U http://wiki.memjet.local/display/memjet/Capacitance+of+a+circular+membrane+capacitor %V 64

@article{citeulike:13513887, added-at = {2017-06-29T07:13:07.000+0200}, author = {Catling, David C.}, biburl = {https://www.bibsonomy.org/bibtex/2070eb253a261f8fa4306e6243c33474c/gdmcbain}, citeulike-article-id = {13513887}, citeulike-attachment-1 = {catling_98_highsensitivity_1004718.pdf; /pdf/user/gdmcbain/article/13513887/1004718/catling_98_highsensitivity_1004718.pdf; 0e53d68403336156fc59a5b7d0db371802759df5}, citeulike-linkout-0 = {http://wiki.memjet.local/display/memjet/Capacitance+of+a+circular+membrane+capacitor}, citeulike-linkout-1 = {http://dx.doi.org/10.1016/s0924-4247(98)80009-5}, doi = {10.1016/s0924-4247(98)80009-5}, file = {catling_98_highsensitivity_1004718.pdf}, interhash = {9881be43b24f885fd143e66fc3704767}, intrahash = {070eb253a261f8fa4306e6243c33474c}, issn = {09244247}, journal = {Sensors and Actuators A: Physical}, keywords = {78a55-optics-electromagnetic-theory-technical-applications 78a30-electro-and-magnetostatics 31c15-potentials-and-capacities}, month = jan, number = 2, pages = {157--164}, posted-at = {2015-02-10 23:52:19}, priority = {2}, timestamp = {2021-09-09T01:02:18.000+0200}, title = {{High-sensitivity silicon capacitive sensors for measuring medium-vacuum gas pressures}}, url = {http://wiki.memjet.local/display/memjet/Capacitance+of+a+circular+membrane+capacitor}, volume = 64, year = 1998 }