%0 Thesis %1 buchwitz1988photochemie %A Buchwitz, Wolfgang %D 1988 %K %T Zur Photochemie und Photolithographie von Negativ-UV-Resists auf der Basis Novolak/Arylazid

@phdthesis{buchwitz1988photochemie, added-at = {2023-12-13T04:44:28.000+0100}, author = {Buchwitz, Wolfgang}, biburl = {https://www.bibsonomy.org/bibtex/2d73287c3de637227f8f46817ab3a6bad/admin}, dnbtitleid = {881299189}, interhash = {99bb77a63c0822eeb940e9709afecd81}, intrahash = {d73287c3de637227f8f46817ab3a6bad}, keywords = {}, school = {HU Berlin}, timestamp = {2023-12-13T04:44:28.000+0100}, title = {Zur Photochemie und Photolithographie von Negativ-UV-Resists auf der Basis Novolak/Arylazid}, year = 1988 }