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NOVEL METHODS FOR DEPOSITION OF BORON CARBIDE FILMS

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Mat. Res. Soc. Symp. Proc., (1991)

Аннотация

By combining pentaborane (B5H9) and decarborane (B10H14) with methane in a plasma reactor, a variety of boron-carbides can be made over a wide range of compositions. The resulting thin films have uniform composition and appear to be polycrystallin

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