%0 Conference Paper %1 conf/nems/LiXW10 %A Li, Sihua %A Xu, Jing %A Wu, Yaming %B NEMS %D 2010 %I IEEE %K dblp %P 1048-1051 %T Design and fabrication of a high fill-factor micro-mirror array. %U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiXW10 %@ 978-1-4244-6543-9

@inproceedings{conf/nems/LiXW10, added-at = {2017-05-17T00:00:00.000+0200}, author = {Li, Sihua and Xu, Jing and Wu, Yaming}, biburl = {https://www.bibsonomy.org/bibtex/254525c724cd3bc6b05775d061ee9e2da/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2010}, ee = {https://doi.org/10.1109/NEMS.2010.5592576}, interhash = {a4c27fd12435dfa39159c3bb9e41903e}, intrahash = {54525c724cd3bc6b05775d061ee9e2da}, isbn = {978-1-4244-6543-9}, keywords = {dblp}, pages = {1048-1051}, publisher = {IEEE}, timestamp = {2019-10-17T22:14:14.000+0200}, title = {Design and fabrication of a high fill-factor micro-mirror array.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiXW10}, year = 2010 }