%0 Journal Article %1 canalejas2013ultrasensitive %A Canalejas-Tejero, V\'ıctor %A Carrasco, Sergio %A Navarro-Villoslada, Fernando %A Fierro, José Luis Garc\'ıa %A del Carmen Capel-Sánchez, Mar\'ıa %A Moreno-Bondi, Mar\'ıa Cruz %A Barrios, Carlos Angulo %D 2013 %I Royal Society of Chemistry %J Journal of Materials Chemistry C %K imported %N 7 %P 1392--1398 %T Ultrasensitive non-chemically amplified low-contrast negative electron beam lithography resist with dual-tone behaviour %V 1

@article{canalejas2013ultrasensitive, added-at = {2019-02-26T21:36:34.000+0100}, author = {Canalejas-Tejero, V{\'\i}ctor and Carrasco, Sergio and Navarro-Villoslada, Fernando and Fierro, Jos{\'e} Luis Garc{\'\i}a and del Carmen Capel-S{\'a}nchez, Mar{\'\i}a and Moreno-Bondi, Mar{\'\i}a Cruz and Barrios, Carlos Angulo}, biburl = {https://www.bibsonomy.org/bibtex/2f46005cfbc3c61fa1b7a37ca2f587cc3/rspreeuw}, interhash = {a599248e8fedc8574ab621663fa485f1}, intrahash = {f46005cfbc3c61fa1b7a37ca2f587cc3}, journal = {Journal of Materials Chemistry C}, keywords = {imported}, number = 7, pages = {1392--1398}, publisher = {Royal Society of Chemistry}, timestamp = {2019-02-26T21:36:34.000+0100}, title = {Ultrasensitive non-chemically amplified low-contrast negative electron beam lithography resist with dual-tone behaviour}, volume = 1, year = 2013 }