%0 Generic %1 Bohm.2009c %A Böhm, S. %A Börner, Chr. %A Löwer, T. %D 2009 %K imported %T The electron beam as versatile tool for the mems and precision engineering technology

@misc{Bohm.2009c, added-at = {2014-03-10T21:14:47.000+0100}, author = {B{\"o}hm, S. and B{\"o}rner, Chr. and L{\"o}wer, T.}, biburl = {https://www.bibsonomy.org/bibtex/2e013f2c972e133ca26fb9a4ee20740f0/konker}, interhash = {b5ff7fb948b3b237b34308a92f8d35f7}, intrahash = {e013f2c972e133ca26fb9a4ee20740f0}, keywords = {imported}, timestamp = {2014-03-10T21:14:47.000+0100}, title = {The electron beam as versatile tool for the mems and precision engineering technology}, year = 2009 }