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%0 Generic
%1 Bohm.2009c
%A Böhm, S.
%A Börner, Chr.
%A Löwer, T.
%D 2009
%K imported
%T The electron beam as versatile tool for the mems and precision engineering technology
@misc{Bohm.2009c,
added-at = {2014-03-10T21:14:47.000+0100},
author = {B{\"o}hm, S. and B{\"o}rner, Chr. and L{\"o}wer, T.},
biburl = {https://www.bibsonomy.org/bibtex/2e013f2c972e133ca26fb9a4ee20740f0/konker},
interhash = {b5ff7fb948b3b237b34308a92f8d35f7},
intrahash = {e013f2c972e133ca26fb9a4ee20740f0},
keywords = {imported},
timestamp = {2014-03-10T21:14:47.000+0100},
title = {The electron beam as versatile tool for the mems and precision engineering technology},
year = 2009
}