%0 Journal Article %1 citeulike:8458895 %C http://www.intechopen.com %D 2009 %E Takahata, Kenichi %I InTech %K mems 80a20-heat-and-mass-transfer %T Micro Electronic and Mechanical Systems %U http://www.worldcat.org/isbn/978-953-307-027-8 %@ 978-953-307-027-8

@article{citeulike:8458895, added-at = {2017-06-29T07:13:07.000+0200}, address = {http://www.intechopen.com}, biburl = {https://www.bibsonomy.org/bibtex/282a50858fe769f73763a36c94b04def4/gdmcbain}, citeulike-article-id = {8458895}, citeulike-linkout-0 = {http://www.worldcat.org/isbn/978-953-307-027-8}, comment = {(private-note)circulated by SGM 2010-12-20}, editor = {Takahata, Kenichi}, interhash = {c2d5a0fe8444e29e5c35f7af4bf8d9fe}, intrahash = {82a50858fe769f73763a36c94b04def4}, isbn = {978-953-307-027-8}, keywords = {mems 80a20-heat-and-mass-transfer}, month = dec, posted-at = {2010-12-19 22:22:44}, priority = {2}, publisher = {InTech}, timestamp = {2019-02-28T23:45:46.000+0100}, title = {{Micro Electronic and Mechanical Systems}}, url = {http://www.worldcat.org/isbn/978-953-307-027-8}, year = 2009 }