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%0 Journal Article
%1 Deinhart_2021
%A Deinhart, Victor
%A Kern, Lisa-Marie
%A Kirchhof, Jan N
%A Juergensen, Sabrina
%A Sturm, Joris
%A Krauss, Enno
%A Feichtner, Thorsten
%A Kovalchuk, Sviatoslav
%A Schneider, Michael
%A Engel, Dieter
%A Pfau, Bastian
%A Hecht, Bert
%A Bolotin, Kirill I
%A Reich, Stephanie
%A Höflich, Katja
%D 2021
%I Beilstein Institut
%J Beilstein J. Nanotechnol.
%K c
%P 304--318
%R 10.3762/bjnano.12.25
%T The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
%U https://doi.org/10.3762%2Fbjnano.12.25
%V 12
@article{Deinhart_2021,
added-at = {2023-11-13T15:29:22.000+0100},
author = {Deinhart, Victor and Kern, Lisa-Marie and Kirchhof, Jan N and Juergensen, Sabrina and Sturm, Joris and Krauss, Enno and Feichtner, Thorsten and Kovalchuk, Sviatoslav and Schneider, Michael and Engel, Dieter and Pfau, Bastian and Hecht, Bert and Bolotin, Kirill I and Reich, Stephanie and Höflich, Katja},
biburl = {https://www.bibsonomy.org/bibtex/2aaee5276218fcd2a199f4e76fe1a66ae/ctqmat},
day = 06,
description = {BJNANO - The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication},
doi = {10.3762/bjnano.12.25},
interhash = {cdf34c7119413a7d5c6e00b9ff5e4540},
intrahash = {aaee5276218fcd2a199f4e76fe1a66ae},
journal = {Beilstein J. Nanotechnol.},
keywords = {c},
month = {04},
pages = {304--318},
publisher = {Beilstein Institut},
timestamp = {2023-11-24T11:46:24.000+0100},
title = {The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication},
url = {https://doi.org/10.3762%2Fbjnano.12.25},
volume = 12,
year = 2021
}