%0 Journal Article %1 Zhao2009 %A Zhao, Siwei %A Cong, Hailin %A Pan, Tingrui %D 2009 %I The Royal Society of Chemistry %J Lab on a Chip %K cheap microchip microfluidics %P 1128-1132 %R 10.1039/b817925e %T Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics %U http://dx.doi.org/10.1039/b817925e %V 9 %X In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 micro signm resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 micro signm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.

@article{Zhao2009, abstract = {In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 [micro sign]m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 [micro sign]m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.}, added-at = {2011-10-01T01:05:44.000+0200}, author = {Zhao, Siwei and Cong, Hailin and Pan, Tingrui}, biburl = {https://www.bibsonomy.org/bibtex/238cdf877d4e446a3d8f19c3043312cf6/afcallender}, citeulike-article-id = {4129138}, citeulike-linkout-0 = {http://dx.doi.org/10.1039/b817925e}, citeulike-linkout-1 = {http://www.rsc.org/Publishing/Journals/article.asp?doi=b817925e}, doi = {10.1039/b817925e}, groups = {public}, interhash = {d47eb3d227096441f3e07d9b37cb0338}, intrahash = {38cdf877d4e446a3d8f19c3043312cf6}, journal = {Lab on a Chip}, keywords = {cheap microchip microfluidics}, pages = {1128-1132}, posted-at = {2009-12-16 14:16:06}, priority = {2}, publisher = {The Royal Society of Chemistry}, timestamp = {2011-10-01T01:05:44.000+0200}, title = {Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics}, url = {http://dx.doi.org/10.1039/b817925e}, username = {afcallender}, volume = 9, year = 2009 }