%0 Conference Paper %1 conf/nems/FangZZ09 %A Fang, Dong-Ming %A Zhang, Haixia %A Zhao, Xiao-Lin %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 25-28 %T Tunable MEMS capacitors considering deformation factor. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#FangZZ09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/FangZZ09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Fang, Dong-Ming and Zhang, Haixia and Zhao, Xiao-Lin}, biburl = {https://www.bibsonomy.org/bibtex/2929733ea582aab2120492488cd836e6a/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068519}, interhash = {d67cd06b23b88a04019ef3ce756dc8fd}, intrahash = {929733ea582aab2120492488cd836e6a}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {25-28}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Tunable MEMS capacitors considering deformation factor.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#FangZZ09}, year = 2009 }