%0 Journal Article %1 anuprnage2013noncontact %A Anup R. Nage, Kunal N. Dekate %D 2013 %E Hope, Dr.Martin %J Int. J. on Recent Trends in Engineering and Technology, %K MEMS Stiction comb drive %N 1 %P 5 %T A Non-Contact Type Comb Drive for the Removal of Stiction Mechanism in MEMS Switch %U http://searchdl.org/public/journals/2013/IJRTET/9/1/25.pdf %V 9 %X One of the barriers to full commercialization of complicated MEMS devices is reliableness. Stiction may be a major obstacle within the reliableness of MEMS electrical phenomenon switches. Stiction failures in microelectromechanical systems (MEMS) occur once suspended elastic members are unexpectedly falls right down to their substrates or once surface forces overcome the mechanical restoring force of a micro-structure. This paper presents the novel comb drive kind of switch. The planned switch is free from microwelding and stiction problem; successively it provides the high reliableness and long period of time. Upon application of a bias voltage, the comb drive maximizes their capacitance by increasing the overlap space between them. The switch is on and off depends on comb drive propulsion principal by the modification of capacitance between the ground line and signal lines. The proposed structure gives very low insertion loss and high isolation.

@article{anuprnage2013noncontact, abstract = {One of the barriers to full commercialization of complicated MEMS devices is reliableness. Stiction may be a major obstacle within the reliableness of MEMS electrical phenomenon switches. Stiction failures in microelectromechanical systems (MEMS) occur once suspended elastic members are unexpectedly falls right down to their substrates or once surface forces overcome the mechanical restoring force of a micro-structure. This paper presents the novel comb drive kind of switch. The planned switch is free from microwelding and stiction problem; successively it provides the high reliableness and long period of time. Upon application of a bias voltage, the comb drive maximizes their capacitance by increasing the overlap space between them. The switch is on and off depends on comb drive propulsion principal by the modification of capacitance between the ground line and signal lines. The proposed structure gives very low insertion loss and high isolation.}, added-at = {2014-02-03T05:38:04.000+0100}, author = {Anup R. Nage, Kunal N. Dekate}, biburl = {https://www.bibsonomy.org/bibtex/2afe0e3815be97946763af0e6d8dfbdc9/idescitation}, editor = {Hope, Dr.Martin}, interhash = {d999c840f99466f922ccb317bea182fe}, intrahash = {afe0e3815be97946763af0e6d8dfbdc9}, journal = {Int. J. on Recent Trends in Engineering and Technology,}, keywords = {MEMS Stiction comb drive}, month = {July}, number = 1, pages = 5, timestamp = {2014-02-03T05:38:04.000+0100}, title = {A Non-Contact Type Comb Drive for the Removal of Stiction Mechanism in MEMS Switch}, url = {http://searchdl.org/public/journals/2013/IJRTET/9/1/25.pdf}, volume = 9, year = 2013 }