%0 Journal Article %1 journals/micromachines/LuZJHZS16 %A Lu, Han %A Zhang, Hua %A Jin, Mingliang %A He, Tao %A Zhou, Guofu %A Shui, Lingling %D 2016 %J Micromachines %K dblp %N 2 %P 19 %T Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. %U http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#LuZJHZS16 %V 7

@article{journals/micromachines/LuZJHZS16, added-at = {2019-07-29T00:00:00.000+0200}, author = {Lu, Han and Zhang, Hua and Jin, Mingliang and He, Tao and Zhou, Guofu and Shui, Lingling}, biburl = {https://www.bibsonomy.org/bibtex/22199564cabd92656594557757d6517a6/dblp}, ee = {https://www.wikidata.org/entity/Q64932465}, interhash = {ddc2dddfdeaa5e1e3d52fb326d34d25d}, intrahash = {2199564cabd92656594557757d6517a6}, journal = {Micromachines}, keywords = {dblp}, number = 2, pages = 19, timestamp = {2019-07-30T11:43:31.000+0200}, title = {Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution.}, url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines7.html#LuZJHZS16}, volume = 7, year = 2016 }