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%0 Conference Paper
%1 conf/irps/SekiIHNSS23
%A Seki, Harumi
%A Ichihara, Reika
%A Higashi, Yusuke
%A Nakasaki, Yasushi
%A Saitoh, Masumi
%A Suzuki, Masamichi
%B IRPS
%D 2023
%I IEEE
%K dblp
%P 1-7
%T Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of Time Constants Based on Dynamic C-V.
%U http://dblp.uni-trier.de/db/conf/irps/irps2023.html#SekiIHNSS23
%@ 978-1-6654-5672-2
@inproceedings{conf/irps/SekiIHNSS23,
added-at = {2023-05-24T00:00:00.000+0200},
author = {Seki, Harumi and Ichihara, Reika and Higashi, Yusuke and Nakasaki, Yasushi and Saitoh, Masumi and Suzuki, Masamichi},
biburl = {https://www.bibsonomy.org/bibtex/240fd648c60f2ddf21cc8b028905daed3/dblp},
booktitle = {IRPS},
crossref = {conf/irps/2023},
ee = {https://doi.org/10.1109/IRPS48203.2023.10118083},
interhash = {ebc91947a31bb146d75de72972f4d41d},
intrahash = {40fd648c60f2ddf21cc8b028905daed3},
isbn = {978-1-6654-5672-2},
keywords = {dblp},
pages = {1-7},
publisher = {IEEE},
timestamp = {2024-04-09T12:18:52.000+0200},
title = {Comprehensive Analysis of Hole-Trapping in SiN Films with a Wide Range of Time Constants Based on Dynamic C-V.},
url = {http://dblp.uni-trier.de/db/conf/irps/irps2023.html#SekiIHNSS23},
year = 2023
}