%0 Journal Article %1 Seo:VarCap %A Seok, Seonho %A Choi, Wonseo %A Chun, Kukjin %D 2001 %J Journal of Micromechanics and Microengineering %K imported %N 12 %P 82-86 %T A novel linearly tunable MEMS variable capacitor %Z comb capacitor with anodic bonding

@article{Seo:VarCap, added-at = {2009-07-13T16:53:55.000+0200}, annote = {comb capacitor with anodic bonding}, author = {Seok, Seonho and Choi, Wonseo and Chun, Kukjin}, biburl = {https://www.bibsonomy.org/bibtex/2ba329322bd188d191ded41cfa7ad02db/enodev}, description = {rfmems}, institution = {Institute of Physic Publishing}, interhash = {fa485d6b43d8fc5383ccfe319a81c4a7}, intrahash = {ba329322bd188d191ded41cfa7ad02db}, journal = {Journal of Micromechanics and Microengineering}, keywords = {imported}, month = {December}, number = 12, pages = {82-86}, timestamp = {2009-07-14T08:40:47.000+0200}, title = {A novel linearly tunable MEMS variable capacitor}, year = 2001 }