%0 Conference Paper %1 conf/ieeesensors/IzharWXL19 %A Izhar, %A Wang, Xiaoyi %A Xu, Wei %A Lee, Yi-Kuen %B IEEE SENSORS %D 2019 %I IEEE %K dblp %P 1-4 %T Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#IzharWXL19 %@ 978-1-7281-1634-1

@inproceedings{conf/ieeesensors/IzharWXL19, added-at = {2022-12-16T00:00:00.000+0100}, author = {Izhar and Wang, Xiaoyi and Xu, Wei and Lee, Yi-Kuen}, biburl = {https://www.bibsonomy.org/bibtex/26e01832347ff830a014af29d22d5054d/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2019}, ee = {https://doi.org/10.1109/SENSORS43011.2019.8956489}, interhash = {67bbc3b5ae1b1103d1200682d89521fc}, intrahash = {6e01832347ff830a014af29d22d5054d}, isbn = {978-1-7281-1634-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-09T12:37:34.000+0200}, title = {Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2019.html#IzharWXL19}, year = 2019 }