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Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications.

, , , and . IEEE SENSORS, page 1-4. IEEE, (2019)

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Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing., , , , and . NEMS, page 134-138. IEEE, (2020)CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application., , , , , and . IEEE Trans. Ind. Electron., 68 (5): 4468-4476 (2021)Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology., , , and . IEEE Trans. Instrum. Meas., (2024)A Highly Robust Silicon Nano-pillar Chip for Electroporation Chip for Delivering Molecules to HeLa Cells., , , , , , and . NEMS, page 230-233. IEEE, (2020)Low-cost Micro Search-Coil Magnetic Sensor with Self Calibration for the Internet of Things., , , and . NEMS, page 813-817. IEEE, (2021)Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications., , , and . IEEE SENSORS, page 1-4. IEEE, (2019)A Nonlinear One-Dimensional Model of Thermoresistive Micro Calorimetric Flow Sensor for Response Time Improving., , , , , and . NEMS, page 67-71. IEEE, (2020)Scaling Analysis and Identification of Critical Dimensions of CMOS Compatible Micro Search-Coil Magnetometers for Internet of Things Application., , , , , and . NEMS, page 95-98. IEEE, (2022)Dual-mode Arduino-based CMOS-MEMS Magnetic Sensor System with Self-calibration for Smart Buildings' Energy Monitoring., , , , , , and . NEMS, page 91-94. IEEE, (2022)A Metaphor and a Conceptual Architecture for Software Development Environments., , and . SEE, volume 467 of Lecture Notes in Computer Science, page 77-97. Springer, (1989)