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%0 Journal Article
%1 journals/sensors/HaubBGZS21
%A Haub, Michael
%A Bogner, Martin
%A Günther, Thomas
%A Zimmermann, André
%A Sandmaier, Hermann
%D 2021
%J Sensors
%K dblp
%N 11
%P 3795
%T Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.
%U http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#HaubBGZS21
%V 21
@article{journals/sensors/HaubBGZS21,
added-at = {2022-01-10T00:00:00.000+0100},
author = {Haub, Michael and Bogner, Martin and Günther, Thomas and Zimmermann, André and Sandmaier, Hermann},
biburl = {https://www.bibsonomy.org/bibtex/28653dd1f34421457fd16468ea6dce350/dblp},
ee = {https://doi.org/10.3390/s21113795},
interhash = {9e9ea9008e324533732262ad565f8e03},
intrahash = {8653dd1f34421457fd16468ea6dce350},
journal = {Sensors},
keywords = {dblp},
number = 11,
pages = 3795,
timestamp = {2024-04-09T04:21:45.000+0200},
title = {Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.},
url = {http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#HaubBGZS21},
volume = 21,
year = 2021
}