%0 Journal Article %1 journals/sensors/HaubBGZS21 %A Haub, Michael %A Bogner, Martin %A Günther, Thomas %A Zimmermann, André %A Sandmaier, Hermann %D 2021 %J Sensors %K dblp %N 11 %P 3795 %T Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning. %U http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#HaubBGZS21 %V 21

@article{journals/sensors/HaubBGZS21, added-at = {2022-01-10T00:00:00.000+0100}, author = {Haub, Michael and Bogner, Martin and Günther, Thomas and Zimmermann, André and Sandmaier, Hermann}, biburl = {https://www.bibsonomy.org/bibtex/28653dd1f34421457fd16468ea6dce350/dblp}, ee = {https://doi.org/10.3390/s21113795}, interhash = {9e9ea9008e324533732262ad565f8e03}, intrahash = {8653dd1f34421457fd16468ea6dce350}, journal = {Sensors}, keywords = {dblp}, number = 11, pages = 3795, timestamp = {2024-04-09T04:21:45.000+0200}, title = {Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors21.html#HaubBGZS21}, volume = 21, year = 2021 }