%0 Journal Article %1 journals/tsmc/QiaoZWZLQ21 %A Qiao, Yan %A Zhang, SiWei %A Wu, NaiQi %A Zhou, MengChu %A Li, ZhiWu %A Qu, Ting %D 2021 %J IEEE Trans. Syst. Man Cybern. Syst. %K dblp %N 3 %P 1612-1629 %T Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints. %U http://dblp.uni-trier.de/db/journals/tsmc/tsmc51.html#QiaoZWZLQ21 %V 51

@article{journals/tsmc/QiaoZWZLQ21, added-at = {2023-01-30T00:00:00.000+0100}, author = {Qiao, Yan and Zhang, SiWei and Wu, NaiQi and Zhou, MengChu and Li, ZhiWu and Qu, Ting}, biburl = {https://www.bibsonomy.org/bibtex/27c831a31128ff0b6d3b7e20b8c077838/dblp}, ee = {https://doi.org/10.1109/TSMC.2019.2899590}, interhash = {a8020d9094ad0479e4b43cf45ec2d197}, intrahash = {7c831a31128ff0b6d3b7e20b8c077838}, journal = {IEEE Trans. Syst. Man Cybern. Syst.}, keywords = {dblp}, number = 3, pages = {1612-1629}, timestamp = {2024-04-08T19:19:07.000+0200}, title = {Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints.}, url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmc51.html#QiaoZWZLQ21}, volume = 51, year = 2021 }