%0 Conference Paper %1 conf/smc/PanZQW14 %A Pan, ChunRong %A Zhou, MengChu %A Qiao, Yan %A Wu, Naiqi %B SMC %D 2014 %I IEEE %K dblp %P 133-138 %T Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting. %U http://dblp.uni-trier.de/db/conf/smc/smc2014.html#PanZQW14 %@ 978-1-4799-3840-7

@inproceedings{conf/smc/PanZQW14, added-at = {2017-05-17T00:00:00.000+0200}, author = {Pan, ChunRong and Zhou, MengChu and Qiao, Yan and Wu, Naiqi}, biburl = {https://www.bibsonomy.org/bibtex/245292426f3862b3ceffed94c56b84cb3/dblp}, booktitle = {SMC}, crossref = {conf/smc/2014}, ee = {https://doi.org/10.1109/SMC.2014.6973896}, interhash = {da3bb0fd571131e0f9cba110110cce1f}, intrahash = {45292426f3862b3ceffed94c56b84cb3}, isbn = {978-1-4799-3840-7}, keywords = {dblp}, pages = {133-138}, publisher = {IEEE}, timestamp = {2019-10-17T22:33:09.000+0200}, title = {Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting.}, url = {http://dblp.uni-trier.de/db/conf/smc/smc2014.html#PanZQW14}, year = 2014 }