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Sliding Mode Control for Nanomanipulation System with Disturbance Compensation Based on Inverse System Decoupling Algorithm.

, , , and . ICNSC, page 1-6. IEEE, (2021)

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Design of a new decoupled XY flexure parallel kinematic manipulator with actuator isolation., and . IROS, page 470-475. IEEE, (2008)Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure., and . ROBIO, page 901-906. IEEE, (2009)Stiffness and statics analysis of a compact 3-PRC parallel micromanipulator for micro/nano scale manipulation., and . ROBIO, page 59-64. IEEE, (2007)A 3-PRS Parallel Manipulator Control Based on Neural Network., and . ISNN (1), volume 4491 of Lecture Notes in Computer Science, page 757-766. Springer, (2007)Novel Design and Modeling of a Mobile Parallel Manipulator., , and . ICRA, page 1135-1140. IEEE, (2006)Modeling and control of rate-dependent hysteresis for a piezo-driven micropositioning stage., and . ICRA, page 1670-1675. IEEE, (2011)A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning., and . IEEE Trans. Ind. Electron., 58 (8): 3601-3615 (2011)Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator., and . IEEE Trans. Robotics, 25 (3): 645-657 (2009)Model Predictive Discrete-Time Sliding Mode Control of a Nanopositioning Piezostage Without Modeling Hysteresis., and . IEEE Trans. Control. Syst. Technol., 20 (4): 983-994 (2012)A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation., and . IEEE Trans Autom. Sci. Eng., 8 (2): 265-279 (2011)