Author of the publication

Conduction and Breakdown Mechanisms in Low-k Spacer and Nitride Spacer Dielectric Stacks in Middle of Line Interconnects.

, , , , and . IRPS, page 1-6. IEEE, (2020)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Statistical aspects of the degradation of LDD nMOSFETs., , , , , , , , and . Microelectron. Reliab., 42 (9-11): 1409-1413 (2002)Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions., , , , , , , , and . VLSI Technology and Circuits, page 1-2. IEEE, (2023)Novel low thermal budget gate stack solutions for BTI reliability in future Logic Device technologies : Invited paper., , , , , , , , , and 3 other author(s). ICICDT, page 1-4. IEEE, (2021)Role of Defects in the Reliability of HfO2/Si-Based Spacer Dielectric Stacks for Local Interconnects., , , , , and . IRPS, page 1-6. IEEE, (2019)Thermomigration-induced void formation in Cu-interconnects - Assessment of main physical parameters., , , , , , , and . IRPS, page 1-7. IEEE, (2023)High-resolution SILC measurements of thin SiO2 at ultra low voltages., , , , , , , , , and . Microelectron. Reliab., 42 (9-11): 1485-1489 (2002)Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps., , , , , , , , and . IRPS, page 1-6. IEEE, (2021)Assessment of critical Co electromigration parameters., , , , , , , , and . IRPS, page 8. IEEE, (2022)TEASE: a systematic analysis framework for early evaluation of FinFET-based advanced technology nodes., , , , , , , , , and 2 other author(s). DAC, page 24:1-24:6. ACM, (2013)Insights into metal drift induced failure in MOL and BEOL., , , , , , and . IRPS, page 3. IEEE, (2018)