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Piezoelectric response of polycrystalline silicon‐doped hafnium oxide thin films determined by rapid temperature cycles

, , , , , , , , и . Adv. Electron. Mater., 6 (3): 1901015 (29.01.2020)

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Walter Kühnel

Wolfgang Kühnel

Elke Kühnel

Ute Kühnel

Waldemar Kühnel

 

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