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A method of structural trimming to reduce mode coupling error for micro-gyroscopes.

, , , , , , and . NEMS, page 805-808. IEEE, (2013)

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Close-loop self-compensation of the coupling error for silicon micromachined gyroscope., , , , and . NEMS, page 1010-1013. IEEE, (2013)Micro-fabricated polymeric thermal actuators array for rectifying the deformation of MEMS substrate., , , , , and . NEMS, page 1046-1049. IEEE, (2013)Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes., , , , , , and . Sensors, 11 (1): 296-309 (2011)Research on the Temperature-dependent Performance Improvement of Butterfly Gyroscope with Stress Isolation., , , , and . NEMS, page 124-127. IEEE, (2023)A novel high-sensitivity butterfly gyroscope driven by horizontal driving force., , , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)Analyzing the frequency response of micromachined capacitive inertial devices by the third harmonic detection., , , , and . NEMS, page 339-342. IEEE Computer Society, (2009)Effect of parasitic resistance on a MEMS vibratory gyroscopes due to temperature fluctuations., , , , , , and . NEMS, page 293-296. IEEE, (2011)A Dual-Butterfly Structure Gyroscope., , , , , and . Sensors, 17 (12): 2870 (2017)A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration., , , , and . Sensors, 17 (10): 2264 (2017)A method of structural trimming to reduce mode coupling error for micro-gyroscopes., , , , , , and . NEMS, page 805-808. IEEE, (2013)