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As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability.

, , , , , , , , , , и . Microelectron. Reliab., 54 (9-10): 1675-1679 (2014)

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Yunlong Zhong

Yunlong Jiao

Yunlong Zhou

Li Li

Li Li

 

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