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Near-Optimal Trajectory Generation for Flexible Motion Systems using Two-Boundary Approach.

, , , , , and . ECC, page 1-6. IEEE, (2023)

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Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing., , and . IEEE Trans Autom. Sci. Eng., 20 (1): 718-732 (2023)Near-Optimal Trajectory Generation for Flexible Motion Systems using Two-Boundary Approach., , , , , and . ECC, page 1-6. IEEE, (2023)In-Flight Estimation of Center of Gravity Position Using All-Accelerometers., , and . Sensors, 14 (9): 17567-17585 (2014)Statistical Characterization of Position-Dependent Behavior Using Frequency-Aware B-Spline., , and . IROS, page 8270-8275. (2023)Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in Optical Lithography Machines: Preliminary Results., , , and . ACC, page 40-47. IEEE, (2021)Point-to-Point Motion Trajectory Generation for Uncertain Systems: A Closed-Form Solution., , and . ACC, page 698-703. IEEE, (2023)On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System., , and . CCTA, page 1089-1094. IEEE, (2021)On Step-and-Scan Trajectories used in Wafer Scanners in Semiconductor Manufacturing., , and . IROS, page 7580-7586. IEEE, (2021)Trajectory Generation Using Activator-Inhibitor Systems., , , , , and . CDC, page 8857-8863. IEEE, (2023)Using Piezoceramic-Actuated Stages in Precision Long-Stroke Motion Systems: A Design Procedure., , and . IROS, page 2659-2664. (2023)