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Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With Two-Space Buffering Modules.

, , , и . IEEE Trans. Syst. Man Cybern. Syst., 44 (12): 1584-1597 (2014)

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Qiao-yan Ye

Yan Yan

Linhan Qiao

Miao Qiao

Wenchao Qiao

 

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