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Determination of the thermal conductivity of composite low-k dielectrics for advanced interconnect structures.

, , , , , , , и . Microelectron. Reliab., 46 (2-4): 232-243 (2006)

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R. A. A. Bowler

°Ake °Akerström

Mohamed A A Anndif

Eltohamy A A Yousef

A Stübing

 

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