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Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules.

, , , and . CASE, page 75-80. IEEE, (2014)

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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net., and . CASE, page 87-92. IEEE, (2006)Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation., and . CASE, page 465-470. IEEE, (2010)Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting., , and . CASE, page 90-95. IEEE, (2011)Linear programming-based approach to scheduling of crude oil operations in refinery with oil type mixing requirement., , and . CASE, page 430-435. IEEE, (2014)Resource selection for distributed manufacturing in agile manufacturing., , and . SMC, page 1578-1582. IEEE, (2003)Resource-Oriented Petri Net-Based Approach to Deadlock Prevention of AMSs., , and . SMC, page 515-520. IEEE, (2015)Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry., , , and . ICNSC, page 1-6. IEEE, (2016)A novel method for deadlock prevention of AMS by using resource-oriented Petri nets., , and . Inf. Sci., (2016)Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets., and . OR Spectrum, 29 (3): 421-443 (2007)Petri net-based real-time scheduling of time-constrained single-arm cluster tools with activity time variation., , and . ICRA, page 5056-5061. IEEE, (2012)