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Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation.

, , , , and . Int. J. Comput. Integr. Manuf., 34 (7-8): 734-751 (2021)

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Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net., , and . ICNSC, page 34-39. IEEE, (2012)Manufacturing process reengineering for mass customization by using flexibility analysis., , and . SMC (6), page 5062-5067. IEEE, (2004)Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry., , , and . ICNSC, page 1-6. IEEE, (2016)A novel method for deadlock prevention of AMS by using resource-oriented Petri nets., , and . Inf. Sci., (2016)Finite-time group consensus via pinning control for heterogeneous multi-agent systems with disturbances by integral sliding mode., , , , and . J. Frankl. Inst., 359 (17): 9618-9635 (2022)Discrete cross-modal hashing with relaxation and label semantic guidance., , , , , , and . World Wide Web (WWW), 27 (1): 4 (January 2024)Liveness of Disjunctive and Strict Single-Type Automated Manufacturing System: An ROPN Approach., , , , and . IEEE Access, (2019)On Algebraic Identification of Critical States for Deadlock Control in Automated Manufacturing Systems Modeled With Petri Nets., , , , , and . IEEE Access, (2019)Elementary Siphon-Based Robust Control for Automated Manufacturing Systems With Multiple Unreliable Resources., , , , and . IEEE Access, (2019)Petri Net-Based Efficient Determination of Optimal Schedules for Transport-Dominant Single-Arm Multi-Cluster Tools., , , , , and . IEEE Access, (2018)