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Global and local residual stress in silicon carbide films produced by plasma-enhanced chemical vapor deposition

, , , and . Surface and Coatings Technology, 200 (16--17): 4825--4834 (2006)
DOI: doi:10.1016/j.surfcoat.2005.04.048

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Introduction., and . Appl. Intell., 22 (1): 7 (2005)Guest Editorial.. Intelligent Automation & Soft Computing, 2 (2): 93-94 (1996)Galaxy clusters at z~1 imaged by ALMA with the Sunyaev-Zel'dovich effect, , , , , , , , , and 8 other author(s). (2022)cite arxiv:2209.09503Comment: 26 pages, 13 figures, 8 tables, submitted to PASJ.Concurrent automata, database computers, and security: a "new" security paradigm for secure parallel processing.. NSPW, page 94-104. ACM, (1993)Classifying twitter data with Naïve Bayes Classifier., , , , and . GrC, page 294-299. IEEE Computer Society, (2012)Robust analysis on promotion duration for two competitive brands., and . J. Oper. Res. Soc., 59 (4): 548-555 (2008)Content-based selective enhancement for streaming video., and . ICIP (2), page 977-980. IEEE, (2001)Surface topographical characterization of silver-plated film on the wedge bondability of leaded IC packages., , , , , , , , and . Microelectron. Reliab., 43 (5): 803-809 (2003)Intel 4 CMOS Technology Featuring Advanced FinFET Transistors optimized for High Density and High-Performance Computing., , , , , , , , , and 73 other author(s). VLSI Technology and Circuits, page 282-283. IEEE, (2022)On constructing minimum height B*-trees in optimal time., and . ACM Southeast Regional Conference, page 445-448. ACM, (1992)