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Adaptive Feedforward for a Wafer Stage in a Lithographic Tool.. IEEE Trans. Contr. Sys. Techn., 21 (3): 875-881 (2013)On discretization of continuous-time LPV control solutions., , and . CoRR, (2022)Physics-guided neural networks for inversion-based feedforward control applied to hybrid stepper motors*., , , , and . CCTA, page 1153-1158. IEEE, (2023)Exact plant inversion of flexible motion systems with a time-varying state-to-output map., , , and . ECC, page 2483-2488. IEEE, (2016)Data-Driven Feedforward Control Design for Nonlinear Systems: A Control-Oriented System Identification Approach., , and . CDC, page 4530-4535. IEEE, (2023)Physics-guided neural networks for feedforward control with input-to-state stability guarantees., , , , , , , and . CoRR, (2023)Nonlinear Model Predictive Control of Ironless Linear Motors., , and . CCTA, page 927-932. IEEE, (2018)Self-tuning disturbance feedforward control with drift prevention for air mount systems., , and . CCA, page 400-405. IEEE, (2015)On improved commutation for moving-magnet planar actuators., , and . CoRR, (2023)On feedforward control of piezoelectric dual-stage actuator systems., , , and . CDC, page 5588-5594. IEEE, (2021)